Cathodic Arc Plasma Source (XHS‑CAIS)
Solid metal propellant, high ionization and high-flux metal beams for coatings and surface engineering.
Cathodic Arc Source XHS‑CAIS
High-flux metal ion beams with interchangeable targets
Evaporates and ionizes metal cathodes to produce high-flux metal ion beams for thin films, surface modification, and research platforms. Compact design, replaceable targets, cooling options, and tunable process parameters.
Key Features
- Multiple metal targets (Cu/Ti/Al etc.)
- High-flux metal ion beam for deposition/surface work
- Modular target swap and cooling for long runs
- Pairs with Faraday/RPA/LP for beam diagnostics
Key Specifications
| Item | Specification |
|---|---|
| Target materials | Various metals () |
| Beam current density | Up to mA/cm² (aperture/condition dependent) |
| Cooling/durability | Forced cooling / replaceable cathode |
| Interfaces | KF / CF / custom flanges |