Optical Emission Spectroscopy (OES)
Non-intrusive spectral diagnostics for species ID and temperature/density estimates, suitable for online monitoring and research.
Key Features
- Non-intrusive, no plasma disturbance
- Identifies atomic/molecular/ionic species, estimates temperature and relative density
- Real-time, supports endpoint detection and QC
- Low cost, easy integration, auto reporting
Key Specifications
| Item | Specification |
|---|---|
| Wavelength range | 200 – 1100 nm () |
| Spectral resolution | Better than 0.1 nm (grating/slit dependent) |
| Detector | High-sensitivity CCD/CMOS (line or area) |
| Fiber interface | SMA905 |
| Software | Line ID, intensity analysis, temperature estimates, export |