Retarding Potential Analyzer (RPA / RFEA)
Measures ion energy distribution and flux for surface processing, ion beam etch, and thruster plume spectrum analysis.
Retarding Potential Analyzer (XHINS-RPA)
High-resolution ion energy and flux diagnostics
XHINS-RPA uses a tunable retarding grid and energy-selective collector to measure and ion flux, supporting step/linear scans and low-noise front-ends. Suited for low/high flux, thruster beams, and process energy spectrum evaluation.
Key Features
- Measures ion energy distribution () and ion flux
- Tunable retarding grid with step/linear scan modes
- Low-noise front-end covering pA to mA ranges
- Cooling/high-power options; easy to pair with scanning or arrays
Key Specifications
| Item | Specification |
|---|---|
| Energy range | 0 – keV-class (custom upper limit) |
| Current range | pA – mA (high-precision detection) |
| Energy resolution | ≤ 1 eV (grid-dependent) |
| Interfaces | KF / CF / custom flanges |