Etch · Deposition · Chamber diagnostics
Semiconductor Manufacturing
For etch, deposition, cleaning, and chamber development, we deliver measurement planning, interface deployment, process commissioning, parameter analysis, and result delivery.
EtchDepositionChamber diagnostics
The diagnostic system connects the test object to target data
The system connects diagnostic instruments, engineering interfaces, motion control, timing control, data acquisition, calibration, analysis, and technical services.
Diagnostics and Measurement
- Plasma parameter measurement
- Optical emission monitoring
- Ion energy and flux analysis
- Measurement-point positioning and scan mechanics
Control and Acquisition
- Recipe synchronization
- Multi-channel acquisition
- Batch traceability
- Runtime status monitoring
Engineering Integration
- Chamber-port adaptation
- Flange and fixture design
- Cabling and control interfaces
- Site installation and safety interlocks
Data and Service
- Parameter extraction and comparison analysis
- Report generation
- Operation procedures
- Training materials and maintenance support
Calibration and system commissioning connect all system modules
- Process baselines, parameter comparison sheets, and abnormality summaries
- Trend records, key-parameter reports, and batch comparison results
- Interface notes, commissioning records, and implementation recommendations
Applicable Process Projects
01
Etch Process Development and Verification
- Focus Metrics
- Plasma density, electron temperature, ion energy, and chamber consistency
- Applicable Scenarios
- New recipe development, process-window confirmation, and cross-tool comparison
- Deliverables
- Process baselines, parameter comparison sheets, and abnormality summaries
02
Deposition and Thin-Film Process Monitoring
- Focus Metrics
- Plasma stability, deposition rate, ion flux, and batch consistency
- Applicable Scenarios
- PVD and PECVD development, film-quality evaluation, and production transfer
- Deliverables
- Trend records, key-parameter reports, and batch comparison results
03
Chamber Diagnostics and Platform Introduction
- Focus Metrics
- Port arrangement, interface alignment, timing synchronization, and equipment integration
- Applicable Scenarios
- New chamber development, platform upgrades, and process-line transfer
- Deliverables
- Interface notes, commissioning records, and implementation recommendations
Implementation Flow
The technical team confirms the target, designs the system, connects the interfaces, calibrates the instruments, completes the data analysis, and supplies the deliverables.
- 01
Process Requirement Confirmation
Confirm process type, chamber condition, recipe stage, measurement points, and focus metrics.
Process scope and constraintsMeasurement-point and operating-condition list - 02
Solution Design and Interface Deployment
Define the diagnostic chain, installation positions, acquisition logic, recipe synchronization, and safety interfaces.
Measurement planInterface notesDeployment checklist - 03
Process Commissioning and Data Acquisition
Complete installation and commissioning, baseline confirmation, batch acquisition, and abnormality re-checks.
Commissioning recordsProcess baselinesRaw data packages - 04
Parameter Analysis and Delivery
Complete key-parameter extraction, batch comparison, abnormality localization, and report delivery.
Parameter reportsComparison analysisOperation procedures and support suggestions
Data and System Delivery
The delivery includes system configuration, interface data, calibration records, raw data, analysis reports, operation instructions, and technical services.
Solution dossier and measurement-point configuration list
Clarify the implementation scope, measurement layout, and configuration logic.
Chamber interface and installation notes
Document port positions, mounting constraints, and interface definitions.
Process baselines and calibration records
Provide baseline parameters, calibration paths, and verification records.
Raw data package and batch comparison sheet
Deliver raw datasets, naming rules, and batch-to-batch comparison tables.
Parameter analysis report and abnormality summary
Summarize key parameters, trend changes, and analysis conclusions.
Operation procedures training materials and maintenance recommendations
Cover operation guidance, routine re-checks, and follow-on maintenance suggestions.
TECHNICAL SERVICES
Implementation Support
On-site commissioning supportBatch re-check supportRemote or on-site collaboration
TECHNICAL DISCUSSION
Configure the Diagnostic System for Your Target Data
Send us the test object, target parameters, and site conditions. The technical team will give the system configuration, interfaces, calibration method, data format, and implementation plan.