Surface Engineering

For coating, etch, activation, and ion-beam treatment, we deliver process diagnostics, interface deployment, parameter commissioning, optimization analysis, and result delivery.

Ion beamsThin filmsUniformity

Contact Technical Team Back to solutions

Surface Engineering BEAM MEASUREMENTS · SURFACE TREATMENT — MATBEAM MEASUREMENTS · SURFACE TREATMENT

SYSTEM ARCHITECTURE

The diagnostic system connects the test object to target data

The system connects diagnostic instruments, engineering interfaces, motion control, timing control, data acquisition, calibration, analysis, and technical services.

TEST OBJECT AND TEST TARGETSurface Engineering

Ion beams · Thin films · Uniformity

Ion Beam and Process Measurement

Ion energy distribution analysis
Beam and current-density measurement
Optical emission and surface-state monitoring
Sample positioning and scan mechanics

Control and Acquisition

Power and gas synchronization
Multi-channel acquisition
Process traceability
Runtime status monitoring

Engineering Integration

Chamber and fixture adaptation
Flange and tooling design
Power, gas, and cabling interfaces
Site installation and safety interlocks

Data and Service

Parameter extraction and comparison analysis
Process-window optimization
Report generation
Training materials and maintenance support

Calibration and system commissioning connect all system modules

SYSTEM OUTPUTTarget Data and Deliverables

Process baselines, parameter comparison sheets, and optimization recommendations
Parameter curves, process windows, and verification records
Interface notes, commissioning records, and implementation recommendations

TARGET MEASUREMENTS

Applicable Process Projects

Coating and Thin-Film Optimization

Focus Metrics: Ion energy, beam uniformity, and comparison with deposition-rate and adhesion results
Applicable Scenarios: Film development, process migration, and batch-consistency control
Deliverables: Process baselines, parameter comparison sheets, and optimization recommendations

Etch and Surface Activation

Focus Metrics: Angular distribution, ion flux, and comparison with removal-rate and surface-energy results
Applicable Scenarios: Pretreatment development, interface activation, and selective etch verification
Deliverables: Parameter curves, process windows, and verification records

Ion Source and Process Platform Integration

Focus Metrics: Ion-source matching, fixture layout, vacuum interfaces, and runtime stability
Applicable Scenarios: New equipment introduction, platform upgrades, and scale-up validation
Deliverables: Interface notes, commissioning records, and implementation recommendations

SYSTEM IMPLEMENTATION

Implementation Flow

The technical team confirms the target, designs the system, connects the interfaces, calibrates the instruments, completes the data analysis, and supplies the deliverables.

01
Process Goal Confirmation
Confirm substrate type, target film or surface function, treatment window, sample count, and focus metrics.
Process targets and constraintsSample and operating-condition list
02
Solution Design and Interface Deployment
Define the ion-source and diagnostic chain, fixture positions, scan path, and vacuum and power interfaces.
Diagnostic planInterface notesDeployment checklist
03
Calibration Commissioning and Process Execution
Complete baseline confirmation, source-stability checks, sample runs, and repeated verification.
Calibration recordsProcess baselinesRaw data packages
04
Parameter Analysis and Optimization Delivery
Complete key-parameter extraction, sample comparison, process-window tuning, and final report delivery.
Parameter reportsOptimization recommendationsOperation procedures and support suggestions

SYSTEM DELIVERY

Data and System Delivery

The delivery includes system configuration, interface data, calibration records, raw data, analysis reports, operation instructions, and technical services.

Solution dossier and measurement-point configuration list

Clarify the implementation scope, measurement layout, and configuration logic.

Vacuum interface and fixture notes

Document chamber interfaces, fixture constraints, and installation requirements.

Calibration records and process baselines

Provide baseline parameters, calibration paths, and verification records.

Raw data package and sample comparison sheet

Deliver raw datasets, naming rules, and sample-to-sample comparison tables.

Parameter analysis report and optimization recommendations

Summarize key parameters, process changes, and optimization conclusions.

Operation procedures training materials and maintenance recommendations

Cover operation guidance, routine re-checks, and follow-on maintenance suggestions.

TECHNICAL SERVICES

Implementation Support

On-site commissioning supportSample re-check supportRemote or on-site collaboration

PRODUCT SET

Diagnostic Products in the System

XHINS-FP Faraday Probe / Faraday Cup Ion Energy Analyzer (RPA: Retarding Potential Analyzer / RFEA: Retarding Field Energy Analyzer)XHINS-EBP ExB Probe / Wien Filter / Particle Velocity Selector XHINS-KF Kaufman Ion Source Systems XHINS-HS Hall Ion Source Systems XHINS-CA Cathodic Arc Plasma Source Systems Optical Emission Spectroscopy (OES)

TECHNICAL DISCUSSION

Configure the Diagnostic System for Your Target Data

Send us the test object, target parameters, and site conditions. The technical team will give the system configuration, interfaces, calibration method, data format, and implementation plan.